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What is the air permeability of quartz glass products

What is the air permeability of quartz glass products

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What is the air permeability of quartz glass products?
 
The structure of quartz glass is relaxed. At high temperature, some gas ions are allowed to diffuse through the network, and the diffusion of sodium ions is faster.
 
This property of quartz glass is very important for users. For example, when quartz glass is used as high temperature container or diffusion tube in semiconductor industry, because of the high purity of semiconductor materials, the refractory materials that need to contact quartz glass as furnace lining must be treated with high temperature and cleaning in advance to remove basic impurities such as potassium and sodium, and then put into quartz glass use.
 
At room temperature, it can be considered that quartz glass is impermeable. At high temperature (such as 700 ℃), the permeability constant of some gases is also very small. So it can be used in high temperature and high vacuum equipment.
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